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Integrated Dry Station
The Prism 500 and Prism 800 systems are available with an integrated dry station. The dry station can be added to a Prism system with an edge carrier conveyor. With this configuration, the substrate moves from the load station into the coating station for coating application. After the coating process is completed, the substrate moves to the dry station where a vacuum hotplate lifts to dry the substrate for a programmed time.
Applications:
- Polyimides
- Photoresists
- Protective Coating for Plasma Dicing
- Optical Coatings
Prism 500:
- Substrates up to 410 mm wide
- Wafers
- Glass
Prism 800:
- Substrates up to 700 mm wide
- Copper Panels
- Glass Panels
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