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Prism: Optimized for Semiconductor Applications
The Prism 300/400 is a fully programmable semiconductor coating system for the precise application of photo-resists, polyimides, photoimagable soldermasks, conductive inks, and other materials. Available in batch configuration or with an in-line conveyor, the Prism leverages USI's patented, nozzle-less ultrasonic spray technology that is industry-proven for a more accurate, thinner coating than conventional air atomizing nozzle or spin coating methods.
Applications include semiconductor wafers, MEMS, and glass panels
Features and Benefits:
- Proprietary, nozzle-less ultrasonic spray head technology
- Thin, uniform, defect-free coating application down to sub-micron thickness
- High material transfer efficiency: up to 99%
- Spray pattern width: 5mm to 200mm
- Available as batch machine or with in-line conveyor
- PMP-100 or PMP-200 Precision Metering Pump liquid delivery system, features:
- Servo drive postive displacement liquid metering pump
- Single (PMP-100) or dual (PMP-200) pump configurations available
- Automatic pump refill from coating reservoir
- Data logging
- Optional heated vacuum chuck
- Optional HEPA Filters
- Optional covered actuators and catch trays
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