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Photoresist for Wafers and MEMS Devices
Ultrasonic Systems, Inc. (USI) manufactures a high performance line of semiconductor coating systems for thin-film photoresist applications on non-traditional wafers and MEMS devices. All Prism Systems feature USI's patented ultrasonic technology, which is industry proven and delivers a more precise spray coating application than conventional wafer spin coating, dispensing and other semiconductor coating technologies. USI's ultrasonic coating technology has proven effective in applying a thin, uniform coating of photoresist in applications where the spin coating method is ineffective, such as those with micro vias and non-circular designs.
Ultra-Spray CAT ILDS Coating Head Assembly
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Ultra-Spray CAT ILDS Spray Head Assembly |
USI's Ultra-Spray Technology enables a more accurate, thinner coating than conventional spray coating technology. The system utilizes a "nozzle-less" ultrasonic spray head and a high performance X-Y-Z motion control platform for development and production environments.
The Ultra-Spray Catenoid (CAT) ILDS head delivers a thin uniform coating to the substrate at a better than 99% transfer efficiency. The Ultra-Spray head:
- Applies Thin, Defect-Free Coating
- Applies a uniform coating with 99% repeatability
- Coating is applied evenly, drying to a consistent film
- Thickness ranges from sub-micron to over 3 microns
PMP100 - Precision Metering Pump
The USI PMP-100 Precision Metering Pump is designed for the delivery of a wide variety of liquid coatings in the Prism coating system product line. The pump contains an integrated stirring mechanism to keep suspensions and slurries properly mixed. All parameters are set with the Prism software.
The pump consists of a precision cylinder and a servo motor driven piston to deliver the liquid to the ultrasonic spray head in the Prism coating system. The pump automatically refills from a holding reservoir that also has an integrated stirring mechanism to keep the coating mixed.
The PMP100 Features:
• 100 ml capacity pump
• Integrated stirring mechanism
• Servo drive piston
• Micro stepping positive displacement
• Software monitors flow volume
• Software control of stirring speed
• Auto refill from holding reservoir
• Integrated stirring in holding reservoir
• Typical flow rate range: 0.05 to 20 ml/minute
Motion and Positioning System
The Prism employs a precision X-Y-Z-θ motion control system. The X-Y motion and positioning system consists of precision ball screw linear actuators with digital AC closed loop servo drive motors.
All Prism Systems Feature:
- Precision ball screw linear actuators
- Digital AC closed loop servo drive motors
- Custom designed Z-stage with optional rotation
- Stainless steel pin chain conveyor
- Welded steel system frame
Control System
The Prism semicondcutor coating system is programmed using USI's Ultra-Coat™ software. This proprietary software is supplied with the system on a PC that uses a Windows XP operating system. The PC contains a multi-axis PCI motion drive system that controls the X-Y-Z-θ gantry. The Ultra-Coat software consists of a graphical user interface (GUI) that allows the user to operate all functions of the Prism including calibration and setup, manual control, diagnostics, creating and editing process programs for selective coating of printed circuit assemblies and general operation of the Prism system. |
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Summary
The Prism semiconductor coating system is the most advanced coating machine on the market today. The Ultrasonic Technology applies the most precise application of semiconductor coating. Coatings will be applied evenly and dry to a thin even coat.
For a demonstration contact Bob LePage, 978-521-0095 ext 21, rlepage@ultraspray.com
 
| Request additional product literature, or download the PDF product brochure on Prism Ultra-Coat. | |
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